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OPERATING INSTRUCTIONS EN
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Table of contents, Table of contents, 1 About this manual 4. 1 1 Validity 4, 1 1 1 Applicable documents 4, 1 2 Conventions 4. 1 2 1 Safety instructions 4, 1 2 2 Pictographs 5, 1 2 3 Instructions in the text 5. 1 2 4 Abbreviations 5, 1 2 5 Symbols used 5, 2 Safety 6. 2 1 Safety precautions 6, 2 2 Protective equipment 7.
2 3 Proper use 7, 2 4 Improper use 8, 3 Transport and storage 9. 3 1 Transport 9, 3 2 Storage 9, 4 Product description 10. 4 1 Product identification 10, 4 1 1 Pump types 10. 4 1 2 Pump features 10, 4 1 3 Variants 10, 4 1 4 Scope of delivery 10. 4 2 Function 11, 4 2 1 Cooling 11, 4 2 2 Rotor bearing 11.
4 2 3 Drive 11, 4 3 Range of application 12, 5 Installation 13. 5 1 Preparatory work 13, 5 2 Set up 13, 5 2 1 Earthquake safety 14. 5 2 2 Use of a splinter shield or protection screen 14. 5 2 3 Vibration damper 14, 5 3 Mounting orientation 15. 5 4 Connecting the high vacuum side 16, 5 4 1 Installation of ISO K flange with ISO K flange 16. 5 4 2 Installation of ISO K flange with ISO F flange 17. 5 4 3 Installation of ISO F with ISO F flange 18, 5 4 4 Installation of CF flanges 19.
5 5 Connecting the fore vacuum side 20, 5 6 Connections to the turbopump 21. 5 6 1 Electronic drive unit 21, 5 6 2 Earthing 21, 5 6 3 Power and electrical supply 21. 5 6 4 Remote plug 22, 5 7 Accessory connection 22, 5 7 1 Air cooling 23. 5 7 2 Venting valve 23, 5 7 3 Sealing gas connection 24. 5 7 4 Heating jacket 24, 5 7 5 Water cooling 26, Table of contents.
6 Operation 27, 6 1 Commissioning 27, 6 2 Operation modes 27. 6 3 Function description 27, 6 3 1 Operation without operating unit 28. 6 3 2 Operation via remote connection 28, 6 3 3 Operation with DCU or HPU 28. 6 3 4 Operation via fieldbus 28, 6 4 Monitoring of the operation conditions 28. 6 4 1 Temperature monitoring 28, 6 4 2 Operation display via LED 29.
6 5 Switching off and venting 29, 6 5 1 Switching off 29. 6 5 2 Venting 29, 7 Maintenance replacement 30, 7 1 Maintenance intervals and responsibilities 30. 7 2 Replacing the operating fluid reservoir 30, 7 3 Replacing the electronic drive unit 31. 7 3 1 Rotation speed set value 32, 8 Decommissioning 33. 8 1 Shutting down for longer periods 33, 8 2 Re starting 33.
8 3 Disposal 33, 9 Malfunctions 34, 9 1 Rectifying malfunctions 34. 10 Service 35, 11 Spare parts HiPace 300 36, 12 Accessories 37. 12 1 HiPace 300 24 V DC 37, 12 2 Differences at HiPace 300 48 V DC 39. 13 Technical data and dimensions 40, 13 1 General 40. 13 2 HiPace 300 24 V DC 40, 13 3 Differences at HiPace 300 48 V DC 41.
13 4 Dimensions 42, Declaration of conformity 43, About this manual. 1 About this manual, 1 1 Validity, This operating manual is for customers of Pfeiffer Vacuum It describes the functioning. of the designated product and provides the most important information for safe use of. the unit The description follows applicable EU guidelines All information provided in this. operating manual refers to the current state of the product s development The documen. tation remains valid as long as the customer does not make any changes to the product. Up to date operating instructions can also be downloaded from. www pfeiffer vacuum com, 1 1 1 Applicable documents. HiPace 300 depending on the model Operating instructions. Operating instructions Electronic drive unit TC 400 standard PT 0203 BN. Operating instructions Electronic drive unit TC 400 PB Profibus PT 0244 BN. Operating instructions Electronic drive unit TC 400 E74 acc Semi E74 PT 0302 BN. Operating instructions Electronic drive unit TC 400 DN DeviceNet PT 0352 BN. Operating instructions Electronic drive unit TC 400 EC EtherCAT PT 0452 BN. Declaration of conformity Part of this document, also available via www pfeiffer vacuum com. 1 2 Conventions, 1 2 1 Safety instructions, The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk.
evaluations and hazard analyses and are oriented on international certification stan. dards as specified by UL CSA ANSI Z 535 SEMI S1 ISO 3864 and DIN 4844 In this. document the following hazard levels and information are considered. Imminent danger, Indicates an imminent hazardous situation that will result in death or serious injury. Possibly imminent danger, Indicates an imminent hazardous situation that can result in death or serious injury. Possibly imminent danger, Indicates an imminent hazardous situation that can result in minor or moderate injury. Command or note, Command to perform an action or information about properties the disregarding of. which may result in damage to the product, About this manual.
1 2 2 Pictographs, Prohibition of an action to avoid any risk of accidents the disregarding. of which may result in serious accidents, Warning of a displayed source of danger in connection with operation of. the unit or equipment, Command to perform an action or task associated with a source of dan. ger the disregarding of which may result in serious accidents. Important information about the product or this document. 1 2 3 Instructions in the text, Work instruction here you have to do something. 1 2 4 Abbreviations, DCU Display Control Unit, HPU Handheld Programming Unit.
TC Electronic drive unit for turbopump, TPS Mains pack. 1 2 5 Symbols used, The following symbols are used consistently throughout the diagrams. High vacuum flange, Fore vacuum flange, V Vacuum flange of the backing pump. Exhaust flange of the backing pump, Electrical connection. Sealing gas connection, Venting connection, Cooling water connection.
2 1 Safety precautions, Duty to inform, Each person involved in the installation operation or maintenance of the vacuum pump. must read and observe the safety related parts of these operating instructions. The operator is obligated to make operating personnel aware of dangers originating. from the vacuum pump the pumped medium and the entire system. Installation and operation of accessories, Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories The in. stallation operation and maintenance of connected devices are described in detail in. the operating instructions of the individual components. For information on order numbers of components see Accessories. Use original accessory parts only, Checking the safety system against excess rotation speed. To provide the functioning of the integrated safety system for avoiding excess rotation. speed the pump must run up from the standstill at least once a year. Switch off the pump and await the complete standstill rotation speed 0 Hz. Run up the pump according to this operating instructions. Danger of unsafe electrical installation, Safe operation after installation is the responsibility of the operator. Do not independently modify or change the pump and electrical equipment. Make sure that the system is integrated in an emergency off safety circuit. Consult Pfeiffer Vacuum for special requirements, Danger due to lack of power disconnection device.
Pump and electronic drive unit are not equipped with a power disconnection device In. stallation of a user supplied power disconnection device in accordance with SEMI S2. Fit a circuit breaker with an interruption rating of min 10 000 A. Danger of electric shock, In case of defect the parts connected to the mains supply are under voltage. Always keep the mains connection freely accessible so you can disconnect it at any. Do not expose any body parts to the vacuum, Observe all safety and accident prevention regulations. Regularly check the proper observance of all safety measures. Power supply The turbopump power supply must apply to the requirements of dou. ble insulation between mains input voltage and operating voltage according to the reg. ulations of IEC 61010 and IEC 60950 Therefore Pfeiffer Vacuum recommends to use. exclusively original power packs and accessories Only in this case Pfeiffer Vacuum. is able to guarantee the compliance of the European and North American guidelines. A safe connection to the protective earthing conductor PE is recommended protec. tion class III, Do not loosen any plug connection during operations. Wait for the rotor to reach standstill before peforming work on the high vacuum flange. Keep leads and cables well away from hot surfaces 70 C. Never fill or operate turbopump with cleaning agent. Do not operate the turbopump with open high vacuum flange. Do not carry out any unauthorized modifications or conversions to the pump. When returning the turbopump observe the shipping instructions. 2 2 Protective equipment, Determined situations concerning the handling of vacuum pumps require wearing of per. sonal protective equipment The owner respectively the employer are obligated to pro. vide an adequate equipment to any operating persons. Danger to health by hazardous substances during maintenance or installation. Depending on the process vacuum pumps components or operating fluids can be con. taminated by toxic reactive or radioactive substances. Wear adequate protective equipment during maintenance and repairs or in case of. reinstallation, Risk of injury through falling objects.
When transporting vacuum pumps by hand there is a danger through loads slipping and. falling down, Carry small and mid size vacuum pumps two handed. Carry vacuum pumps 20 kg by a suitable lifting device. Wear safety shoes with steel toe cap according to directive EN 347. Risk of injury through hot surfaces, Vacuum pumps can become hot during operation. Allow the pump to cool before maintenance and repairs. If necessary wear protective gloves according to EN 420. Risk of injury through sharp edges, Rotor and stator disks of turbopumps have very sharp edges. Before any working wait for the complete standstill of the pump. Do not reach in the high vacuum flange, If necessary wear protective gloves according to EN 420. 2 3 Proper use, EC conformity, The manufacturer s declaration of conformity becomes invalid if the operator modifies.
the original product or installs additional components. Following installation into a plant and before commissioning the operator must check. the entire system for compliance with the valid EU directives and reassess it accord. The vacuum pump may only be used to generate a vacuum. Only operate the turbopump with an approved backing pump. 2 4 Improper use, Improper use will cause all claims for liability and warranties to be forfeited Improper use. is defined as usage for purposes deviating from those mentioned above especially. installation of the pump with unspecified mounting material. pumping of corrosive or explosive media, pumping of condensing vapors. pumping of liquids, pumping of dusts, operation with improper high gas throughput. operation with improper high fore vacuum pressures. operation with improper gas mode, operation with improper high levels of insulated heat input. operation in improper high magnetic fields, venting with improper high venting rates.
use of the vacuum pump to generate pressure, operation of the devices in areas with ionizing radiation. operation in potentially explosive areas, use of the devices in systems in which impact like stress and vibrations or periodic. forces affect the devices, use of accessories or spare parts which are not named in this manual. warranty seal Closure seal, The product is sealed at the factory Damaging or removal of a closure seal leads to the. loss of liability and warranty entitlements, Do not open the product within its warranty period.
For process related shorter maintenance intervals please contact the Pfeiffer Vacu. um Service, Transport and storage, 3 Transport and storage. 3 1 Transport, Reuse the transport container of the vacuum pump. Transport or ship vacuum pumps in the original packing preferably. Only remove the protective covers from the high vacuum and the fore vacuum side. immediately before connection, Keep the original protective covers. Always transport the turbopump in its upright position. 3 2 Storage, Close the flange openings by using the original protective covers. Close further connection ports by using the corresponding protective covers. Store the pump only indoors at temperatures between 25 C and 55 C. In rooms with moist or aggressive atmospheres the pump must be airproof shrink. wrapped in a plastic bag together with a bag of desiccant. Product description, 4 Product description, 4 1 Product identification.
4 1 1 Pump types, The product designation consists of a family designation 1 the size 2 which is orient. ed on the pumping speed and if applicable the additional properties 3 of the pump. HiPace 1 300 2 3, 1 Family designation 2 Model designation 3 Property designation. HiPace 300 Model designation of none Standard version. the pump related to its pump U Upside down installation orientation. ing speed class C Corrosive gas version, M Active magnetic bearing. T Temperature management system, E High Efficiency. H High Compression, I Ion implantation, 4 1 2 Pump features.
This product has been tested to the requirements of CAN CSA C22 2 No 61010 1 sec. ond edition including Amendment 1 or a later version of the same standard incorporat. from the vacuum pump the pumped medium and the entire system Installation and operation of accessories Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories The in stallation operation and maintenance of connected devices are described in detail in the operating instructions of the individual components

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