2019 | 2 views | 0 downloads | 25 Pages | 1.29 MB
MIID: Preventing Contaminating Cross Connections in Semiconductor Process Toolsin Semiconductor Process Tools A presentation to the CMP Users Group
Chemical Cross Connectionsz Bulk pressurized deliverysystems create a need tocross connect the DI Watersystem with variouschemical delivery systemsz Typical arrangementsprovide only singlecontainmentTypical Cross Connectionz Resulting in the potential arrangementcross contamination ofthese interconnected11 May 09 2009 Malema Sensorstt solutionz Sometimes we ll add check valves to mitigatethe potential This solution isnisn tt allowed inpotable water systems because of itsunreliability3 2009 Malema SensorsSimplest form of Backflow Preventionz Simple reliableinexpensiveIt s h your sinkdishwasher avoidcross connectionz Approved fro use inPotable water4 2009 Malema SensorsCommon Products for Potable Water SystemsPressure Hose BibBackflow BackflowPreventer PreventerIrrigationPreventersIndustrial Reduced PressureBackflow Preventer5 2009 Malema Sensorsz The MIID product functions as a backflowpreventer in cross connected high puritycritical liquids applicationsz Markets serviced includeSemiconductor manufacturingPharmaceutical11 May 09 2009 Malema Sensorsz Backflow prevention utilizing the DoubleBlock BleedBleed methodz Malema proprietary ultra low level by passleak detection11 May 09 2009 Malema SensorsClassic Double Block BleedVent Active Open or protective mode11 May 09 2009 Malema SensorsClassic Double Block BleedVent Inactive Closed or dispense mode11 May 09 2009 Malema SensorsT i l DI WaterTypical W t Loopz DI Water Loops likethis exist in mostevery wafer fabz Under normalcircumstances theywork dependably DI Water10 2009 Malema SensorsT i l ToolTypical T l Connectionsz A major usese of DIWater in anyprocess tool is forthe safe flushingand dilution ofchemical pipingsystems duringmaintenanceoperations11 2009 Malema SensorsW t Slurryz If either pump shutsz The fab level pressurez Gravity continuesworking on thecontained liquid andthe pressure not onlydrops but can generatesignificant vacuum atthe POU valve Bulkmanifold Sl12 2009 Malema SensorsHow does the MIID address this problemz The MIID eliminates these problemsz The design of the MIID prevents backi h even if a valvel or valvesCross Connect manifold leak sz Th MIID incorporatesThe i t a MalemaM l lleakk sensorthat warns of leaking valves before a backsiphonage event occurs and before crosscontamination results13 2009 Malema SensorsMIID standingt di guardz MIID acts toprevent crosscontaminationfrom occurringz A Malema leaksensor providesid Cleanroom Levela warning prior toa backflow eventSub Fab Level11 May 09 2009 Malema SensorsMalema Double Block BleedVent Active Open or protective mode15 2009 Malema Sensors
05-Dec-2019 0 Views 14 Pages
Fluids Module Student Guide 7 Activity 9 A ship is in a canal lock, which is only a little bit larger than the ship itself. The ship is loaded with steel ingots, which are large bars of steel. The crew becomes angry with the captain of the ship and throws the steel ingots overboard into the water of the lock.
05-Dec-2019 0 Views 30 Pages
Packs, Stupes and Poultices Contents Pages A. Introduction to the Edgar Cayce Readings on Health and Healing 4 B. Packs from Edgar Cayce Encyclopedia of Healing 8 C. Packs from The E.C. Handbook for Health Through Drugless Therapy 10 D. Cayce Packs, Stupes and Poultices: Definitions and Details 12 1. Castor Oil Pack 13
05-Dec-2019 1 Views 20 Pages
1.9 taxonomy is the science that brings order and meaning to the puzzle of diversity 1.10 a group of organisms with many similarities (dogs are a kind of living thing) 1.11 the genetic principle of parents producing offspring like themselves. 1.12 true 1.13 false 1.14 false 1.15 true 1.16 true 1.17 false 1.18 true 1.19 true 1.20 three groups of plants (herbs, shrubs, trees) and two groups of ...
05-Dec-2019 0 Views 20 Pages
sections of 21CFR dedicated to the specific food type (i.e., package fill level control for certain food categories) Additional sections of 21CFR control and direct GMP (110-111), while others control the packaging of specific food categories and systems (e.g., 113, thermally-processed low acid foods and 129, bottled water)
05-Dec-2019 0 Views 15 Pages
E numbers are codes for food additives which are found on food labels throughout the EU. For example, E300 is vitamin C. Q. Why are food additives used? GCE Topic 2 Information on food labels 12 Labelling laws: controls on additives All food additives used in the EU undergo the following steps. Step 1: A safety evaluation Step 2: Acceptable Daily Intake (ADI) (determining the level below which ...
05-Dec-2019 0 Views 18 Pages
* Does the SCCNFP propose any restrictions or condition of the use of inorganic sulfites and bisulfites in cosmetic products? 1.3 Statement on the toxicological evaluation The SCCNFP is the scientific advisory body to the European Commission in matters of consumer protection with respect to cosmetics and non-food products intended for consumers.
05-Dec-2019 0 Views 96 Pages
Our industry 2016. Food Feed Fuel 3 2 1 0 +1.2-1.6% CAGR 1980 1990 2000 2015 2027 We need to grow more with less Our global challenge Agricultural production will need to increase substantially with limited natural resources The UN estimates that by 2030 the world will need 30 % more fresh water and 50 % more energy; by 2050 we will need 70 % more food Global grain demand Population growth and ...
05-Dec-2019 0 Views 12 Pages
Using GGE as a base, it is easy to determine that it takes 0.88 gallon of diesel and 1.35 gallons of LPG to match the energy found in one gallon of gasoline. To put it simply, it requires more fuel to do the same work! (Fig. 1) Fuel prices are volatile and can change drastically over time. Yet, we can still make cost comparisons for each fuel. Using the GGE data shown previously, cost ...
05-Dec-2019 0 Views 213 Pages
NACS POS/Back Office Interface Guidelines Version 3.0 DRAFT age P 7 Chapter 1- General Information BACKGROUND Version 1.0 The NACS POS/Back Office Standards Committee (Committee), at its meeting on May 9, 1997, appointed an adhoc Task Force to develop a list of data elements, organized in tables, for the exchange of information
05-Dec-2019 0 Views 41 Pages
2014 14.4 3.75 1.75 a 18.15 2015 15 5.5 3 a 20.5 2016 15 7.25 4.25 a 22.25 2017 15 9 5.5 a 24 2018 15 11 7 a 26 2019 15 13 8.5 a 28 2020 15 15 10.5 a 30 2021 15 18 13.5 a 33 2022 15 21 16 a 36 2023 b b b b b * 2009/2010 Combined a. To be determined by EPA through a future rulemaking but no less than 1.0 billion gallons b. To be determined by ...