
2019 | 2 views | 0 downloads | 25 Pages | 1.29 MB
MIID: Preventing Contaminating Cross Connections in Semiconductor Process Toolsin Semiconductor Process Tools A presentation to the CMP Users Group
Chemical Cross Connectionsz Bulk pressurized deliverysystems create a need tocross connect the DI Watersystem with variouschemical delivery systemsz Typical arrangementsprovide only singlecontainmentTypical Cross Connectionz Resulting in the potential arrangementcross contamination ofthese interconnected11 May 09 2009 Malema Sensorstt solutionz Sometimes we ll add check valves to mitigatethe potential This solution isnisn tt allowed inpotable water systems because of itsunreliability3 2009 Malema SensorsSimplest form of Backflow Preventionz Simple reliableinexpensiveIt s h your sinkdishwasher avoidcross connectionz Approved fro use inPotable water4 2009 Malema SensorsCommon Products for Potable Water SystemsPressure Hose BibBackflow BackflowPreventer PreventerIrrigationPreventersIndustrial Reduced PressureBackflow Preventer5 2009 Malema Sensorsz The MIID product functions as a backflowpreventer in cross connected high puritycritical liquids applicationsz Markets serviced includeSemiconductor manufacturingPharmaceutical11 May 09 2009 Malema Sensorsz Backflow prevention utilizing the DoubleBlock BleedBleed methodz Malema proprietary ultra low level by passleak detection11 May 09 2009 Malema SensorsClassic Double Block BleedVent Active Open or protective mode11 May 09 2009 Malema SensorsClassic Double Block BleedVent Inactive Closed or dispense mode11 May 09 2009 Malema SensorsT i l DI WaterTypical W t Loopz DI Water Loops likethis exist in mostevery wafer fabz Under normalcircumstances theywork dependably DI Water10 2009 Malema SensorsT i l ToolTypical T l Connectionsz A major usese of DIWater in anyprocess tool is forthe safe flushingand dilution ofchemical pipingsystems duringmaintenanceoperations11 2009 Malema SensorsW t Slurryz If either pump shutsz The fab level pressurez Gravity continuesworking on thecontained liquid andthe pressure not onlydrops but can generatesignificant vacuum atthe POU valve Bulkmanifold Sl12 2009 Malema SensorsHow does the MIID address this problemz The MIID eliminates these problemsz The design of the MIID prevents backi h even if a valvel or valvesCross Connect manifold leak sz Th MIID incorporatesThe i t a MalemaM l lleakk sensorthat warns of leaking valves before a backsiphonage event occurs and before crosscontamination results13 2009 Malema SensorsMIID standingt di guardz MIID acts toprevent crosscontaminationfrom occurringz A Malema leaksensor providesid Cleanroom Levela warning prior toa backflow eventSub Fab Level11 May 09 2009 Malema SensorsMalema Double Block BleedVent Active Open or protective mode15 2009 Malema Sensors