Copper Pillar Bumping Technology Semitracks-Books Pdf

Copper Pillar Bumping Technology Semitracks
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Issue 36 June 2012, Figure 1 An example of a circuit that employs copper pillar bumping. Copper pillar bumping is intended as a replacement to traditional solder bumping While solder. bumping is a lower cost process than copper pillar bumping it doesn t allow for the density and current. capacity afforded by copper pillar bumping Because of their lower resistance they don t heat as much as. a solder bump reducing electromigration issues This permits higher densities copper pillars can be uti. lized on pitches of less than 400 microns as well as in wafer level chip scale packages Copper pillars also. afford superior power management both thermal and electrical Lower resistances mean less heating in. the pillars and less voltage drop within each pillar. Copper pillars can be held to the substrate more securely through the use of an underfill The underfill. is applied as a non conductive paste in the open areas between the pillars The chip is then placed onto. the substrate and the underfill is snap cured The coefficient of thermal expansion of the underfill pulls. the chip to the substrate more than the copper pillar bumps placing them in compression Figure 2 shows. the deformed tin silver cap on the copper pillar that results from this process. Figure 2 Copper pillar bumps with tin silver cap Image courtesy ChipWorks. Copper pillar technology can be used on small dice in small packages like quad flat no lead or QFN. packages on medium dice with the pillars providing connection to a laminate substrate and on large dice. Issue 36 June 2012,mounted on fine pitch laminate substrates. For small dice copper pillars can be used with no underfill in injection molded components like QFN. and Thin Small Outline Packages or TSOPs The connections can be made using solder materials with no. clean fluxes For medium and large sized dice underfills with flux are required to stabilize the stresses be. tween the die and the substrate The underfills can use capillary action and can be reworkable or. non reworkable, Here is an example of a small die in a flip chip on lead or FCOL package The copper pillar is mounted. to the bond pad and the die is flipped upside down and mounted to the copper leadframe with a reflow. able tin solder, Figure 3 Optical image of a cross section through an FCOL package with copper pillar bumps. Copper pillar bumps are now commonly used on QFN packages They provide benefits for high speed. circuits including improved co planarity and heat dissipation QFN packages do not have gull wing leads. that act as antennae creating noise in high frequency applications The electrical performance is also bet. ter than traditional leaded packages, For large dice Intel Amkor and Texas Instruments have all released products that use fine pitch copper.
pillar bumps These devices have utilized more than 200 I O connections These manufacturers have pri. marily used no clean fluxes, Copper pillar bumping is now being used in microprocessor applications as well The advantages are a. similar to those of other components one can achieve superior electrical performance improved thermal. management and implement this with a lead free solution. Figure 4 helps to illustrate the micro bumping process This is a process that facilitates die to die. bonding Copper pillars are attached to both dice with tin solder applied to one of the die In this example. we show it applied to the flipped die The dice are brought in contact with one another and then subjected. to reflow The solder is consumed as well as a portion of the copper pillars forming an intermetallic com. pound that provides the mechanical and electrical connection. Figure 4 Die to die bonding using copper pillar bumps and tin solder. Issue 36 June 2012, The materials used for copper pillar bump assembly vary from company to company Most manufac. turers are experimenting with no flow underfills no clean fluxes and pre plated leadframes typically. nickel palladium gold to provide both manufacturability and reliability improvements. Let s focus on the flux issue for a moment Ultrasonic cleaning is a popular method for the cleaning of. flux residue In fact ultrasonic frequencies around 40 kilohertz work great for cleaning flux residue from. stencils and bare boards However applying the frequency for a longer time period or using lower fre. quencies may cause damage to certain components when a board is populated This has lead to the use of. multisonic cleaning where a combination of frequencies is used to reduce damage Therefore one must be. careful of how frequencies are applied for cleaning One phenomenon that occurs during ultrasonic clean. ing is micro bubble cavitation However decreased bump height and copper pillar heights cannot be. cleaned as easily since the ultrasonic wavefronts cannot penetrate the smaller features The smaller fea. tures are also more susceptible to damage since lowering the energy reduces the cleaning capability This. involves tradeoffs in time ultrasonic energies and ultrasonic frequencies. Scaling has introduced several problems with flip chip bump scaling One issue is intermetallic com. pound formation As the solder bumps scale down the intermetallic formation does not This leads to situ. ations where all that remains of the solder joint is the intermetallic compounds Voiding can lead to weak. mechanical and higher resistance pillars, Another source of reliability problems with copper pillar bumping is with the thermomechanical. stress inherent in the package These forces introduce stress into the interconnect layers on the IC Cop. per has a different coefficient of thermal expansion than the die which leads to these stresses Figure 6. shows how those stresses manifest themselves in the vicinity of the copper pillar The red regions indicate. high stress levels, Figure 5 Simplified model for thermomechanical stresses in copper pillar bumps. Issue 36 June 2012, Figure 6 Simulation data showing high levels of stress in the interconnect layers.
just above and below the copper pillar bump, In conclusion copper pillar bumping is likely to increase in the future as a packaging technology The. superior resistance properties of copper allows for smaller bumping pitches and improves electrical and. thermal performance on these circuits Although thermomechanical stresses are a concern as well as the. processing constraints that surround copper wires and pillars the advantages outweigh the problems Ex. pect to see this technology more in the future,Issue 36 June 2012. Technical Tidbit,Muons and Single Event Upsets, Most people working in semiconductor reliability positions are aware that alpha particles and. neutrons can lead to single event upsets Alpha particles are generated by contaminants and radioactive. materials in both plastic and ceramic packages and solder bumps They can also be generated by neutron. collisions with silicon and with boron 10 in borophosphosilicate glasses Another particle that is less. known for upsets is the muon Muons are subatomic particles that can be either positively or. negatively charged They have a mass of approximately 200 electrons and a lifetime of. approximately 2 2 sec Low energy muons with energies of 0 5 to 1 0 MeV can generate significant. charge within an integrated circuit Unlike neutrons that infrequently impact the nuclei of other atoms. muons generate charge carriers through the electromagnetic force If the technology feature sizes allow. for the collection of that charge the integrated circuit can experience an upset So even low muon fluxes. can significantly add to the single event rate for sensitive devices Figure 1 below shows simulated muon. kinetic energy distributions as seen on the front of the part corresponding to experimental momenta. including upstream energy losses and straggling on the bottom part of the figure Experimental error. counts for 65 nm 45 nm and 40 nm SRAMs versus estimated muon kinetic energy at 1 0 V bias on the top. part of the figure The dashed horizontal line represents an approximate muon induced SEU cross section. for reference, Figure 1 Top experimental error counts in three IC technologies and. bottom simulated muon kinetic energy distributions Sierawski et al IRPS pp 247 252 2011. This problem is likely to increase in the future as we scale to smaller devices since the charge volumes. decrease Many researchers believe muons will become a more significant contribution to single event. upsets at the 32nm node and below,Issue 36 June 2012.
Ask the Experts, Q Can etching of the polyimide layer to form windows for the bond pads on a. circuit subsequently create poor contact for bond wires. A Yes this has been observed in the past The etch residues and hydrolysis products. affect the surface of the bond pad degrading its adhesive properties An early. paper that discussed this problem is C G Shirley and M S DeGuzman Moisture. Induced Gold Ball Bond Degradation of Polyimide Passivated Devices in Plastic. Packages Proc IRPS pp 217 226 1993, Spotlight on our Courses Package Reliability Device Qualification. We will begin offering a new course on Package Reliability and Device Qualification later this year. Here is more information about the course If you are interested in attending this course or if you re. interested in having this course as an in house course for your staff please feel free to contact us at 505. 858 0454 or at info semitracks com, Package reliability and qualification continues to evolve with the electronics industry New electronics. applications require new approaches to reliability and qualification In the past reliability meant. discovering characterizing and modeling failure mechanisms and determining their impact on the. reliability of the circuit Today reliability can involve tradeoffs between performance and reliability. assessing the impact of new materials dealing with limited margins etc In particular the proliferation of. new package types This requires information on subjects like statistics testing technology processing. materials science chemistry and customer expectations While customers expect high reliability levels. incorrect testing calculations and qualification procedures can severely impact reliability Your company. needs competent engineers and scientists to help solve these problems Semiconductor Reliability and. Qualification is a four day course that offers detailed instruction on a variety of subjects pertaining to. semiconductor reliability and qualification This course is designed for every manager engineer and. technician concerned with reliability in the semiconductor field qualifying semiconductor components. or supplying tools to the industry, Participants learn to develop the skills to determine what failure mechanisms might occur and how to. test for them develop models for them and eliminate them from the product. 1 Overview of Reliability and Statistics Participants learn the fundamentals of statistics sample. sizes distributions and their parameters, 2 Failure Mechanisms Participants learn the nature and manifestation of a variety of failure.
mechanisms that can occur both at the die and at the package level These include time dependent. dielectric breakdown hot carrier degradation electromigration stress induced voiding moisture. corrosion contamination thermomechanical effects interfacial fatigue etc. Issue 36 June 2012, 3 Qualification Principles Participants learn how test structures can be designed to help test for a. particular failure mechanism, 4 Test Strategies Participants learn about the JEDEC test standards how to design screening tests. and how to perform burn in testing effectively,COURSE OBJECTIVES. 1 The seminar will provide participants with an in depth understanding of the failure mechanisms. test structures equipment and testing methods used to achieve today s high reliability. components, 2 Participants will be able to gather data determine how best to plot the data and make inferences. from that data, 3 The seminar will identify the major failure mechanisms explain how they are observed how they.
are modeled and how they are eliminated, 4 The seminar offers a variety of video demonstrations of analysis techniques so the participants. can get an understanding of the types of results they might expect to see with their equipment. 5 Participants will be able to identify the steps and create a basic qualification process for. semiconductor devices, 6 Participants will be able to knowledgeably implement screens that are appropriate to assure the. reliability of a component, Participants will be able to identify appropriate tools to purchase when starting or expanding a. laboratory,INSTRUCTIONAL STRATEGY, By using a combination of instruction by lecture video problem solving and question answer. sessions participants will learn practical approaches to the failure analysis process From the very first. moments of the seminar until the last sentence of the training the driving instructional factor is. application We use instructors who are internationally recognized experts in their fields that have years. of experience both current and relevant in this field The handbook offers hundreds of pages of. additional reference material the participants can use back at their daily activities. THE SEMITRACKS ANALYSIS INSTRUCTIONAL VIDEOS, One unique feature of this workshop is the video segments used to help train the students Reliability.
Analysis is a visual discipline The ability to identify nuances and subtleties in graphical data is critical to. locating and understanding the defect Some tools output video images that must be interpreted by. engineers and scientists No other course of this type uses this medium to help train the participants. These videos allow the analysts to directly compare material they learn in this course with real analysis. work they do in their daily activities,Issue 36 June 2012. COURSE OUTLINE,Day One Lecture Time 8 Hours,1 Introduction to Reliability. a Basic Concepts,b Definitions,c Historical Information. 2 Statistics and Distributions,a Basic Statistics,b Distributions Normal Lognormal Exponent Weibull. c Which Distribution Should I Use,d Acceleration,e Number of Failures.
Day Two Lecture Time 8 Hours,3 Overview of Die Level Failure Mechanisms. a Time Dependent Dielectric Breakdown,b Hot Carrier Damage. c Negative Bias Temperature Instability,d Electromigration. e Stress Induced Voiding,4 Package Level Mechanisms. a Ionic Contamination,b Moisture Corrosion,i Failure Mechanisms.
ii Models for Humidity,iii Tja Considerations,iv Static and Periodic stresses. v Exercises,c Thermo Mechanical Stress,ii Failure Mechanisms. d Interfacial Fatigue,i Low K fracture,e Thermal Degradation Oxidation. Issue 36 June 2012,Day Three Lecture Time 8 Hours,5 Package Attach Solder Reliability. a Creep Sheer Strain,b Lead Free Issues,c Electromigration Thermomigration.
d MSL Testing,e Exercises,6 TSV Reliability Overview. 7 Board Level Reliability Mechanisms,a Interposer,b Substrate. 8 Electrical Overstress ESD,9 Test Structures and Test Equipment. 10 Developing Screens Stress Tests and Life Tests,b Life Testing. d JEDEC based Tests,e Exercises,Day Four Lecture Time 8 Hours.
11 Calculating Chip and System Level Reliability,12 Developing a Qualification Program. b Standards Based Qualification,c Knowledge Based Qualification. d JEDEC Documents JESD47H JESD94 JEP148,e Exercises. Issue 36 June 2012, Semitracks will be offering two courses this year in. conjunction with Semicon West Copper Wire Bonding and. Challenges and Advanced Semiconductor Reliability and. Characterization Challenges, Click here for more information on the Copper Wire Bonding.
Course and here for the Reliability Challenges Course. SEMICON West 2012,July 10 12,Moscone Center San Francisco California. Stop by and see us,http www semiconwest org,Issue 36 June 2012. Upcoming Courses,Click on each item for details,MEMS Technology. June 12 13 2012 Tues Wed,Enschede Netherlands,Reliability Challenges. July 11 2012 Wed,San Francisco CA USA,Copper Wire Bonding.
July 11 12 2012 Wed Thur,San Francisco CA USA,ESD Design and Technology. July 15 17 2012 Sun Tues,Tel Aviv Israel,Failure and Yield Analysis. July 15 18 2012 Sun Wed,Feedback Tel Aviv Israel,Copper Pillar Technology. and Challenges, If you have a suggestion or a comment regarding our courses online. training discussion forums or reference materials or if you wish to. suggest a new course or location please call us at 1 505 858 0454 or. Email us info semitracks com July 18 19 2012 Wed Thur. To submit questions to the Q A section inquire about an article or Penang Malaysia. Semiconductor Reliability, suggest a topic you would like to see covered in the next newsletter.
please contact Jeremy Henderson by Email, jeremy henderson semitracks com July 31 August 3 2012 Tues Fri. We are always looking for ways to enhance our courses and educational Singapore. Polymers and FTIR, For more information on Semitracks online training or public courses. visit our web site August 16 17 2012 Thur Fri,http www semitracks com San Jose California. Failure and Yield Analysis,August 27 30 2012 Mon Thur. To post read or answer a question visit our forums San Jose California.

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